Acoustic Enhancement of Surface Diffusion

The idea of acoustic activation of surface diffusion is explored theoretically and in atomistic simulations. It is found that a substantial diffusion enhancement by surface acoustic waves is possible via (1) transient surface straininduced modification of the diffusion barriers, (2) adiabatic variation in the surface temperature, and (3) dynamic coupling of the acoustic waves with vibrational states of adsorbed species. The approximate scaling laws describing the first two effects are established and verified in kinetic Monte Carlo simulations. The combined contribution of all three effects is studied in molecular dynamics simulations, and the conditions for the diffusion activation through the dynamic coupling are elucidated. The acoustic enhancement of surface diffusion provides an attractive alternative to thermal activation in thin film growth on heat-sensitive substrates.